About: http://webisa.webdatacommons.org/194881995

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Contact vias may be etched in the fill structures and the vias filled with conductive material such as aluminum or cobalt to form contacts.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com