About: http://webisa.webdatacommons.org/195067249

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferred barrier/lining layers include such layers as tantalum (Ta), tantalum nitride (TaN), titanium (Ti), and titanium nitride (TiN), or a combination of these layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca