About: http://webisa.webdatacommons.org/195197210

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The laser beam concentrated into a linear shape having a width of 100 to 1000 ??m, for example 400 ??m, is then irradiated over the entire surface of the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au