About: http://webisa.webdatacommons.org/195197211

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first insulating film 540 is formed of an inorganic material such as silicon oxide, silicon nitride, or silicon oxynitride, and has a thickness of 50 to 500 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au