About: http://webisa.webdatacommons.org/19529154

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Note that Total etching time (sec) is not a parameter but is a record of the actual time required to etch wire 19, expressed in seconds.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com