About: http://webisa.webdatacommons.org/195419489

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention relates to an objective, particularly a projection objective for use in semiconductor lithography, having optical elements such as lenses and mirrors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca