About: http://webisa.webdatacommons.org/195429180

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The active etching species is used in combination with a heavier bombarding or sputtering ion and, optionally, lighter species such as oxygen, helium, and nitrogen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com