About: http://webisa.webdatacommons.org/195497522

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The tunnel insulation film 31 is formed of a silicon oxide film, a silicon oxinitride film or a silicon nitride film, with a thickness of, e.g. about 1 nm to 10 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com