About: http://webisa.webdatacommons.org/196196608

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These barrier and other layers are typically composed of Ti/TiN for aluminum metallization and of Ta/TaN for copper metallization, but other materials are possible.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca