About: http://webisa.webdatacommons.org/196242711

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	(5) The compound used in the LPCVD method is represented by SinCl2n+2 or SinCl2n+2???xHx, where n is an integer of 2 or more, and x is an integer smaller than 2n+2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com