About: http://webisa.webdatacommons.org/196313663

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the micro inspecting stage, a defect of for example 0.1 ??m or larger can be detected.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es