About: http://webisa.webdatacommons.org/196400322

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this method, there is a problem that the isolated Si region is determined in advance of prepared the device so that the degree of freedom of device designing is limited.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com