About: http://webisa.webdatacommons.org/196401025

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In some instances, a non-reactant carrier gas, such as hydrogen, is also injected into the processing chamber, together with either or both of the reactant or dopant gases.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com