About: http://webisa.webdatacommons.org/196587100

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An adherent etch barrier layer 10 (see FIG. 3) of a material such as silicon nitride, aluminum nitride, boron nitride, aluminum oxide, or silicon carbide is then deposited.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr