About: http://webisa.webdatacommons.org/196598577

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a semiconductor chip such as an IC, LSI or VLSI, a highly-integrated circuit surface tends to be affected by the change in ambient temperature of humidity, or fine dust.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk