About: http://webisa.webdatacommons.org/196652335

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In preferred embodiments, a substrate such as a silicon wafer is coated with a polyimide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com