About: http://webisa.webdatacommons.org/196782679

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Spatial filter 50 can be fabricated in situ by exposing a recording medium, such as a photographic plate, to light diffracted by all of the dies 14 of wafer 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com