About: http://webisa.webdatacommons.org/196821088

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Applicant's have found that Argon is particularly useful as a sputtering gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es