About: http://webisa.webdatacommons.org/19694124

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, localized stresses may cause wafer cracking, breakage, warpage and the like, particularly in the case of a very thin substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com