About: http://webisa.webdatacommons.org/197043099

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ers, a technique such as vapor deposition or sputtering can be used in a conventional vapor phase film growing unit.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com