| http://www.w3.org/ns/prov#value | - e of a material such as quartz which transmits ultraviolet rays therethrough, a xenon lamp 16 for generating ultraviolet rays, a power source 15 for the xenon lamp 16, and a mirror 17 for reflecting the ultraviolet rays from the xenon lamp 16 in a direction toward the substrate 6 in a way that ultraviolet rays from the xenon lamp 16 advance along a light path 18.
|
