About: http://webisa.webdatacommons.org/197790021

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a plan view illustrating the formation of cell 100 after the etching of ONO layer 136 and polysilicon layer 134 to form stacked ONO/poly-p structures 144.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com