About: http://webisa.webdatacommons.org/197791728

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a vertical cross section of an essential portion of a microwave plasma processing apparatus showing its outline configuration according to this invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr