| http://www.w3.org/ns/prov#value | - Further, there is a method to suppress the voltage change between the ends of the electrostatic attracting film by shortening the period of the pulse bias voltage to 0.1 ??s to 10 ??s, preferably, 0.2 ??s to 5 ??s (corresponding to repeating frequency of 0.2 MHz to 5 MHz) so that the pulse duty (T1/T0) is set as 0.05???(T1/T2)???0.4.
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