About: http://webisa.webdatacommons.org/198142693

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	{circle around (1)} A reference plane including the surface of a shot portion on the wafer 210 is the imaging plane (optimal imaging plane) of the projection optical system 209.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com