About: http://webisa.webdatacommons.org/198219910

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As with insulating layer 14, insulating layer 22 may include a dielectric material, such as silicon dioxide, silicon nitride, silicon oxynitride, or any combination of such layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com