About: http://webisa.webdatacommons.org/198251234

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the motor spindle 19 turns rapidly to rotate the wafer chuck 13 and a wafer 15 held on the chuck, the motor 21 and spindle 19 tend to heat up, through friction and other losses.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es