About: http://webisa.webdatacommons.org/198253121

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown more clearly in FIGS. 2 and 4, the plate 52 is a segment or portion of the second bit or plate line 28, which can also be formed from the first layer of doped polysilicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com