About: http://webisa.webdatacommons.org/198290302

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A substrate, such as a silicon wafer, is placed in a chamber, and the chamber is then vacuumized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com