About: http://webisa.webdatacommons.org/198308618

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 4D, the first and second via holes 28 a and 28 b are filled with a conductive material, for example, a metal such as tungsten or the like, using CVD or sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com