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About: http://webisa.webdatacommons.org/198604310

PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
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  • Table 4 is a comparison of the wet etch rate ratios of SACVD USG films with different ramp-up rates on bare silicon and PE TEOS substrates.
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  • google.com