About: http://webisa.webdatacommons.org/199057976

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a problem that when crystallization to form a semiconductor film is performed by laser light irradiation according to the above procedure, a resulting semiconductor film does not have proper characteristics.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com