About: http://webisa.webdatacommons.org/199127055

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a problem in that the decrease in sputtering rate with a sputtering method using ceramic targets made of HfO2 and Y2O3 as sputtering targets significantly slows down the deposition rate of a dielectric film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com