About: http://webisa.webdatacommons.org/199164495

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	No. 10/068,513 filed 6 Feb. 2002, entitled ???Phase Shift Masking for Complex Patterns with Proximity Adjustments,??? invented by Christophe Pierrat, which application is a continuation-in-part of U.S. patent application Ser.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au