| http://www.w3.org/ns/prov#value | - For example, the hard mask layer 22 may be an insulating layer, such as silicon nitride, silicon oxynitride, aluminum oxide or tantalum oxide when the first layer is silicon oxide, spin-on glass, PSG, BPSG or a polymer layer, such as a siloxane or silsesquioxane (i.e., hydrogen silsesquioxane or ???HSQ???).
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