About: http://webisa.webdatacommons.org/199484394

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A preparation process may include cleaning the substrate and forming layers and regions of the substrate, such as drains and sources prior to forming a gate dielectric in the formation of a metal oxide semiconductor (MOS) transistor.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr