About: http://webisa.webdatacommons.org/199487025

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A process, such as chemical vapor deposition, etching, etc., to be performed with respect to the substrate in the processing chamber 17 may now begin.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es