About: http://webisa.webdatacommons.org/199538748

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Opening portions formed in the deformable electrode (upper electrode) to remove the sacrificial film is laid out in a region other than regions on the main part of the lower electrode and on the support electrode, as described above.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com