About: http://webisa.webdatacommons.org/199552379

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A process gas is introduced into a reaction chamber containing a susceptor having a first region on which a semiconductor substrate is placed and a second region other than the first region, upon which a ceramics insulator is placed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com