About: http://webisa.webdatacommons.org/199613735

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	of bulk Si when heavily doped by n-type dopants such as P and As followed by pulsed-laser annealing [28].
http://www.w3.org/ns/prov#wasQuotedFrom	hindawi.com