About: http://webisa.webdatacommons.org/199772420

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, techniques such as X-ray and electron beam lithography are used to form individual sensors as opposed to more efficient simultaneous definition of all sensors on a wafer surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com