About: http://webisa.webdatacommons.org/199944351

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Topics include types of substrates, process dependent characteristics, properties of semiconductors, cleaving, etching and... http://www.cleanroom.byu.edu/everything_wafers.phtml more info
http://www.w3.org/ns/prov#wasQuotedFrom	amser.org