About: http://webisa.webdatacommons.org/199953736

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a film including a metal layer of chromium or titanium may be formed on a silicon substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com