About: http://webisa.webdatacommons.org/200259671

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first and second insulation layer patterns 169 and 181 may include oxide such as silicon oxide or nitride such as silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com