About: http://webisa.webdatacommons.org/200467324

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 20 is preferably of a semiconductor-based material such as silicon or a silicon-germanium alloy, but the substrate may be selected from group consisting of Group IV, Group III-V and II-VI semiconductors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com