About: http://webisa.webdatacommons.org/200538669

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When any dielectric layer is formed, especially a gate oxide or any other thin oxide, a defect known as a micropore is usually formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com