About: http://webisa.webdatacommons.org/200828045

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 9, further including calculating the critical dimension deviation for N defect-free features on the simulated wafer image of the physical mask, wherein N is an integer equal to or greater than two.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com