About: http://webisa.webdatacommons.org/200904829

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The film thickness of the thin film is not particularly limited, and is usually from 1 nm to 100 ??m, preferably from 10 nm to 10 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com