About: http://webisa.webdatacommons.org/200925848

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The cavity is then filled with epitaxially grown SiGe material, which may be in-situ doped with a material such as boron and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com