About: http://webisa.webdatacommons.org/200954809

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These thicknesses are selected, particularly in the modified forms of the invention, for obtaining desired sensor precision and long-term stability and temperature coefficient properties over wide temperature changes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com